![]() ![]() This Lamb wave resonating sensor can achieve measurement in fairly large viscosity media while keeping a quality factor superior to 90. s viscosity), and 93 for pure glycerol with a viscosity of 985 mPa.The out-of-plane vibrating mode exhibits quality factor of 169, obtained in deionized water (1.22 mPa s, which is a larger dynamic range compared to existing mechanical resonators showing an upper limit of 700 mPa.The system is calibrated while performing measurements in water glycerol solutions with a density range from 997 to 1264 kg/m 3 and viscosity from 1.22 to 985 mPa The combination of the measured resonance frequency and quality factor enables extraction of density and viscosity of the surrounding liquid. The Lamb mode used for these measurements allows us to infer both the density and viscosity in a larger range as compared to the existing gold-standard techniques of MEMS resonators. This paper reports on a new system for liquid density and viscosity measurement based on a freely suspended rectangular vibrating plate actuated by piezoelectric ceramic (PZT) actuators.
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